4027A Series, Precision Power Sensors
40207A Series, CW RF Power Sensors
Thruline Directional RF Power Sensors (±1% Accuracy)
For over three decades, Bird’s 4027 RF Power Sensor families have set the benchmark for precision and reliability in the semiconductor industry. Supporting continuous wave (CW) signals, the 4027 Series achieves ±1% accuracy at calibrated frequencies and power levels, ensuring precise measurements for critical semiconductor and laboratory applications.
Long-Term Reliability
With a 30-year legacy as the industry standard for plasma-enhanced etching and deposition, these sensors offer dependable performance, minimizing downtime and maintenance costs.
NIST-Traceable Confidence
Calibration traceable to the National Institute of Standards and Technology (NIST) provides assurance in measurement integrity for calibrating RF generators in semiconductor tools—ensuring tight process control and repeatable results across production lines.
Built to Withstand Fab Environments
Rugged and reliable, these sensors are made to endure daily use in cleanroom and production environments without compromising accuracy—delivering lab-grade performance on the fab floor.
