4027F Series

Precision Filtered RF Power Sensors (±1% Accuracy)

Bird’s 4027F Series RF Power Sensors are designed specifically for use in semiconductor processing and other precision process applications where the effects of amplitude modulation and harmonics need to be eliminated from the measurement. Because accuracy is critical, these sensors are capable of ±1% accuracy at the calibrated frequency and power level. Calibration is traceable to the National Institute of Standards and Technology (NIST), providing additional confidence in sensor measurement.

• Provides fintered measurement where the effects of amplitude modulation and harmonics need to be eliminated
• ±1% accuracy at specified frequencies and power levels
• Models do not need to be field calibrated before use and olny need to be calibrated once every year
• Plug and Play with the 4412A Series, Multifunction Power Meter
• Dozens of connector options available

• Enhances the set point accuracy of the CW RF source
• Optimizes source-to-source consistency across the fleet
• Delivers forward and reflected power measurements to 1% accuracy
• Maximizes the measurement accuracy of your main signal by filtering harmonics