4027F Series, Filtered Power Sensors

4027F Series, Filtered Power Sensors

Filtered RF Power Sensors for Precision Process Applications

1% Accurate Precision Filtered Power Sensors

Bird’s® 4027F Series, RF Power Sensors are designed specifically for use in semiconductor processing and other precision process applications where the effects of amplitude modulation and harmonics need to be eliminated from the measurement. At the calibrated frequency and power level, these sensors are capable of 1% accuracy. With calibration traceable to the National Institute of Standards and Technology,you can be confident of the measurements these sensors provide.

Connectors are required to be equipped on BOTH the INPUT and OUTPUT side of the sensor. Bird guarantees the 4027 Series Sensors at +-1% Accuracy only with connectors the sensor is calibrated and sold with from our factory.

Sensor Selections

Models Power Range Frequency
4027F2M 100 W - 10 kW 1.8-2.2 MHz
4027F10M 100 W - 10 kW 12-15 MHz
4027F60M 100 W - 6 kW 57-63 MHz

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