4027F2M, 1.8-2.2 MHz Filtered Power Sensor (CALDATA included)

4027F2M, 1.8-2.2 MHz Filtered Power Sensor (CALDATA included)

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1.8-2.2 MHz, 100W to 10kW

4027F2M, RF Power Sensor is designed for use in semiconductor processing and other precision process applications. At the calibrated frequency and power level, these sensors are capable of 1% accuracy. Intended for use with Bird 4421A Series Precision Multifunction Power Meters, these sensors provide a threefold improvement in long term unit to unit accuracy.


Problems/Solutions

  • Poor production yields - 1% accuracy at specified frequencies and power levels
  • Lack of confidence in measurements - Calibration traceable to NIST
  • Complex tools requiring calibration each time
    • Plug and Play with 4421A Meter
    • Unit does not need to be field calibrated before use
    • Calibrate only once every six months
  • Harmonic content interfering with measurements
  • Wide range of applications requiring various input and output connectors - Dozens of connector options available

Specifications:

  • Frequency Range: 1.8-2.2 MHz
  • Power Range: 100W to 10kW
  • Accuracy: ±1% at calibration frequencies and power levels
    ±2 % at other frequency and power levels
    Add 2% to uncertainty outside 25 ± 10 C
  • Calibration Power Level: 1700W
  • Uniformity: 2 % maximum unit to unit, at calibration frequency and power levels
  • Speed: 2 readings per second
  • Maximum Power: 10 kW units - 12 kW (max)
    6 kW units - 7.2 kW (max)
  • VSWR Range: 1.0-2.0
  • Directivity: 28 dB
  • Insertion Loss: <0.05 dB
  • External DC: 12 VDC, supplied from 4421A Multifunction Power Meter
  • Connectors: Input and Output Connectors MUST be ordered separately at additional cost
  • Calibration Cycle: 6 month. Performance before and performance after data to be supplied for units

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