RF Pulse Power Sensors

RF Pulse Power Sensors

7027 & 7037 Series, Precision RF Pulse Sensors

Superb Accuracy!

For precision semiconductor applications, the 7027 and 7037 Series RF Pulse Power sensors bring stunning and traceable accuracy to laboratory and semiconductor fab environments. Designed to provide ease of use and reliable data for development and production engineers.

At calibrated frequencies, these sensors are capable of 0.5% (7037 Series) or 1% (7027 Series) accuracy for measurements of the gated power within a RF pulsed waveform. Calibration is traceable to the National Institute of Standards and Technology (NIST) so you can be confident in the quality and accuracy of the measurements these sensors provide.


  • Time Domain Display
  • Gated power measurements with up to four sets of gates available
  • Capable of ±0.5% and ±1% power measurement accuracy over full dynamic range at calibrated frequencies.
  • NIST traceable calibration
  • Harmonic filtering
  • External sync input
  • RF Interlock (optional)
  • Programmable with SCPI command set


  • With RF generator calibration and verification, these high-accuracy sensors deliver confidence in the RF generator output.
  • Use the VPM3-MSP Software to log and analyze the RF power data from experimental recipes for more streamlined process development.
  • In-situ processes monitoring allows for real time monitoring of processes at runtime to detect anomalies.
  • Time domain analysis of RF pulse waveforms provide a closer look at high power RF pulses.

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