For precision semiconductor applications, the 7027 and 7037 Series RF Pulse Power sensors bring stunning and traceable accuracy to laboratory and semiconductor fab environments. Designed to provide ease of use and reliable data for development and production engineers.
At calibrated frequencies, these sensors are capable of 0.5% (7037 Series) or 1% (7027 Series) accuracy for measurements of the gated power within a RF pulsed waveform. Calibration is traceable to the National Institute of Standards and Technology (NIST) so you can be confident in the quality and accuracy of the measurements these sensors provide.
Time Domain Display
Gated power measurements with up to four sets of gates available
Capable of ±0.5% and ±1% power measurement accuracy over full dynamic range at calibrated frequencies.
NIST traceable calibration
External sync input
RF Interlock (optional)
Programmable with SCPI command set
With RF generator calibration and verification, these high-accuracy sensors deliver confidence in the RF generator output.
Use the VPM3 to log and analyze the RF power data from experimental recipes for more streamlined process development.
In-situ processes monitoring allows for real time monitoring of processes at runtime to detect anomalies.
Time domain analysis of RF pulse waveforms provide a closer look at high power RF pulses.