Using sophisticated parallel signal processing, the Bird Diagnostic System (BDS2) simultaneously measures and reports voltage, current, and phase angle at multiple fundamental, harmonic and intermodulation frequencies.
A robust frequency tracking algorithm guarantees accurate measurements under dynamic signal conditions. With this data, power and impedance are calculated at each frequency, giving users the ability to identify small discrepancies that may make the difference between a successful and a failed process.
1% accurate measurement of RF voltage and current with a locked system
Calculated impedance, RF power
Multi-level pulse or CW waveforms
1-3 fundamental frequencies
4 harmonics per fundamental frequency
6 intermodulation products per fundamental pair
Tracking & Spectral search mode
Chamber to chamber matching
RF process monitoring
Troubleshooting RF delivery system
Identify process drifts
Harmonic levels up to 252 MHz are available for analysis
Voltage, current, phase and delivered power comparison