Bird Diagnostic System (BDS2)

Inline VI Probe System

Using sophisticated parallel signal processing, the Bird Diagnostic System (BDS2) simultaneously measures and reports voltage, current, and phase angle at multiple fundamental, harmonic and intermodulation frequencies.

A robust frequency tracking algorithm guarantees accurate measurements under dynamic signal conditions. With this data, power and impedance are calculated at each frequency, giving users the ability to identify small discrepancies that may make the difference between a successful and a failed process.

• 1% accurate measurement of RF voltage and current with a locked system
• Calculated impedance, RF power
• Multi-level pulse or CW waveforms
• 1-3 fundamental frequencies
• 4 harmonics per fundamental frequency
• 6 intermodulation products per fundamental pair
• Time-domain mode
• Tracking & Spectral search mode
• Ethernet enabled

• Chamber to chamber matching
• RF process monitoring
• Impedance matching
• Troubleshooting RF delivery system
• Identify process drifts
• Harmonic levels up to 252 MHz are available for analysis
• Voltage, current, phase and delivered power comparison