Non-50 Ohm V-I-Φ RF System
BDS2, Bird Diagnostic System
Real-time V-I-Φ insight for demanding RF plasma tools
Precision V-I-Φ Measurements for Plasma Processes - Engineered for RF-driven plasma applications, Bird’s BDS2 V-I-Φ measurement solution delivers real-time voltage, current, phase angle, and impedance across fundamental and harmonic and intermodulation frequencies. With dynamic impedance tracking and time-synchronized measurement, it provides the visibility needed to optimize match tuning, detect process drift, and stabilize chamber conditions. Built for the fab floor, it brings metrology-grade performance into live production so you can control your RF process with clarity and confidence.
In RF-driven manufacturing processes like plasma etch, deposition, and plasma dicing unseen signal distortion or impedance drift can silently degrade performance, reduce yield, or trigger tool variability. Basic power sensors only tell part of the story. Without full visibility into voltage, current, phase, and impedance across all relevant frequencies you risk flying blind. The cost? Wasted wafers, failed processes, and delayed diagnostics. The Bird BDS2 delivers the clarity needed to troubleshoot confidently, optimize aggressively, and prevent issues before they impact production.
Impedance Clarity Across Every Frequency
Unlike basic V-I probes, the BDS2 computes impedance, return loss, and reflection coefficient across fundamental, harmonic, and IMD components.
This enables fine-tuned process control and smarter fault diagnostics where traditional sensors fall short.
Total Signal Visibility in Real Time
The BDS2 doesn’t just measure forward and reflected power it captures voltage, current, and phase angle simultaneously.
You get a complete, time-synchronized view of your RF signal at every relevant frequency not just the fundamentals.
Seamless Integration Without Disruption
Bird’s custom designed sensor heads are engineered to drop into the existing RF path without altering impedance characteristics or delivery geometry.
That means you get precision V-I-Φ measurements without changing your validated process recipes.
